Reaction mechanism of the Me3AuPMe3–H2 plasma-enhanced ALD process-Reference-Cited by-同舟云学术

Reaction mechanism of the Me3AuPMe3–H2 plasma-enhanced ALD process

Published:2020 Issue:21 Volume:22 Page:11903-11914
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Van Daele Michiel¹²³⁴⁵^ORCID,Griffiths Matthew B. E.⁶⁷⁸⁹,Minjauw Matthias M.¹²³⁴⁵,Barry Seán T.⁶⁷⁸⁹,Detavernier Christophe¹²³⁴⁵,Dendooven Jolien¹²³⁴⁵^ORCID

Affiliation:

1. Ghent University

2. Department of Solid State Sciences

3. CoCooN Research Group

4. Ghent 9000

5. Belgium

6. Carleton University

7. Department of Chemistry

8. Ottawa K1S 5B6

9. Canada

Abstract

The reaction mechanism of the recently reported Me₃AuPMe₃–H₂ plasma gold ALD process was investigated using in situ characterization techniques in a pump-type ALD system.

Funder

Fonds Wetenschappelijk Onderzoek

Vlaamse regering

Natural Sciences and Engineering Research Council of Canada

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2020/CP/C9CP06855D

Reference39 articles.

1. Atomic Layer Deposition of Gold Metal

2. Thermal Atomic Layer Deposition of Continuous and Highly Conducting Gold Thin Films

3. Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature

4. Chemistry of gold(I, III) complexes with organic ligands as potential MOCVD precursors for fabrication of thin metallic films and nanoparticles

5. 64. Tertiary phosphine complexes of trimethylgold: infrared spectra of complexes of gold and some other metals

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Common Precursors and Surface Mechanisms for Atomic Layer Deposition;Comprehensive Organometallic Chemistry IV;2022

2. Thermal ranges and figures of merit for gold-containing precursors for atomic layer deposition;Journal of Vacuum Science & Technology A;2021-03