Synergistic improvement of sensing performance in ferroelectric transistor gas sensors using remnant polarization

Author:

Shin Wonjun1,Yim Jiyong2ORCID,Bae Jong-Ho3,Lee Jung-Kyu1,Hong Seongbin1ORCID,Kim Jaehyeon1,Jeong Yujeong1,Kwon Dongseok1,Koo Ryun-Han1,Jung Gyuweon1,Han Changhyeon2,Kim Jeonghan2,Park Byung-Gook1,Kwon Daewoong2,Lee Jong-Ho1ORCID

Affiliation:

1. Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea

2. Department of Electrical Engineering, Inha University, Incheon, Korea

3. School of Electrical Engineering, Kookmin University, Seoul 02707, Korea

Abstract

Polarization, and the opportunities it affords, are exploited in NO2 gas detection using HZO as the ferroelectric layer to control the gas-sensing performance of the ferroelectric TFT gas sensors.

Funder

Seoul National University

Inha University

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrical and Electronic Engineering,Process Chemistry and Technology,Mechanics of Materials,General Materials Science

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