Potential of gas-assisted time-of-flight secondary ion mass spectrometry for improving the elemental characterization of complex metal-based systems-Reference-Cited by-同舟云学术

Potential of gas-assisted time-of-flight secondary ion mass spectrometry for improving the elemental characterization of complex metal-based systems

Published:2020 Issue:12 Volume:35 Page:2997-3006
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Priebe Agnieszka¹²³⁴^ORCID,Xie Tianle¹²³⁴⁵,Pethö Laszlo¹²³⁴,Michler Johann¹²³⁴

Affiliation:

1. Empa, Swiss Federal Laboratories for Materials Science and Technology

2. Laboratory for Mechanics of Materials and Nanostructures

3. CH-3602 Thun

4. Switzerland

5. College of Material Science and Engineering

Abstract

Enhancing the spatial resolution of TOF-SIMS, which provides 3D elemental distribution in combination with high sensitivity and molecular information, is currently one of the hottest topics in the field of chemical analysis at the nanoscale.

Funder

H2020 Marie Skłodowska-Curie Actions

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/JA/D0JA00372G

Reference45 articles.

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3. S. Fearn , An introduction to time-of-flight secondary ion mass spectrometry (ToF-SIMS) and its application to materials science , Morgan & Claypool Publishers , San Rafael, CA, USA , 2015

4. J. Kuo , Electron Microscopy: Methods and Protocols (Methods in Molecular Biology) , Humana Press , Totowa, New Jersey , 2nd edn, 2007

5. Ultra high spatial resolution SIMS with cluster ions - approaching the physical limits

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