Preparation and unique dielectric properties of nanoporous materials with well-controlled closed-nanopores
Author:
Affiliation:
1. State Key Laboratory Cultivation Base for Nonmetal Composite and Functional Materials
2. Southwest University of Science and Technology
3. Mianyang
4. China
5. Hefei Institutes of Physical Science
Abstract
Although general porous materials have a low dielectric constant, their uncontrollable opened porous structure results in high dielectric loss and poor barrier properties, thus limiting their application as interconnect dielectrics.
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2016/CP/C6CP00465B
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