1. Center of Nanoelectronics and School of Microelectronics
2. Shandong University
3. Jinan 250100
4. P. R. China
5. Shenzhen Research Institute of Shandong University
6. State Key Laboratory of Multiphase Complex Systems
7. Institute of Process Engineering
8. Chinese Academy of Sciences
9. Beijing 100190
10. SEU-FEI Nano-Pico Center
11. Key Lab of MEMS of Ministry of Education
12. Collaborative Innovation Center for Micro/Nano Fabrication
13. Device and System
14. Southeast University