Direct synthesis of graphene on silicon oxide by low temperature plasma enhanced chemical vapor deposition
Author:
Affiliation:
1. Materials Science Factory
2. Instituto de Ciencia de Materiales de Madrid
3. (ICMM) Consejo Superior de Investigaciones Científicas (CSIC)
4. Madrid
5. Spain
Abstract
Direct, low temperature, catalyst-free and transfer-free growth of monolayer graphene films on silicon wafer with a native oxide.
Funder
H2020 European Research Council
Ministerio de Economía y Competitividad
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2018/NR/C8NR03210F
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