A predictive approach to CVD of crystalline layers of TMDs: the case of MoS2
Author:
Affiliation:
1. Centre for Nano Science and Engineering
2. Indian Institute of Science
3. Bangalore 560012, India
4. Materials Research Centre
Abstract
A generic approach suitable to all TMDs has been demonstrated. Thermodynamic modeling identifies the appropriate CVD process window and the growth is controlled by tuning the vapor phase supersaturation. Consequently MoS2 growth, bulk to monolayers, has been achieved.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2015/NR/C4NR07080A
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