A study on the technical improvement and the crystalline quality optimization of columnar β-Ga2O3 crystal growth by an EFG method

Author:

Fu Bo1234,Mu Wenxiang12345,Zhang Jin1234,Wang Xiqiu6789,Zhuang Wenchang6789,Yin Yanru12345,Jia Zhitai12345ORCID,Tao Xutang12345ORCID

Affiliation:

1. State Key Laboratory of Crystal Materials

2. Shandong University

3. Jinan 250100

4. China

5. Key Laboratory of Functional Crystal Materials and Device

6. School of Chemistry and Chemical Engineering

7. Xuzhou Institute of Technology

8. Xuzhou 221018

9. P.R. China

Abstract

Innovative technology assessment and crystalline quality optimization of columnar β-Ga2O3 crystal growth were performed via an EFG method.

Funder

Key Technology Research and Development Program of Shandong

National Natural Science Foundation of China

Natural Science Foundation of Shandong Province

China Postdoctoral Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Reference39 articles.

1. Recent progress in the growth of β-Ga2O3 for power electronics applications

2. A review of Ga2O3materials, processing, and devices

3. Recent progress on the electronic structure, defect, and doping properties of Ga2O3

4. A. Kuramata , K.Koshi , S.Watanabe , Y.Yamaoka , T.Masui and S.Yamakoshi , Bulk crystal growth of Ga2O3, in Oxide-based Materials and Devices IX , International Society for Optics and Photonics , 2018 , vol. 10533 , p. 105330E

5. Large-size β-Ga2O3 single crystals and wafers

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