Parallelization of thermochemical nanolithography-Reference-Cited by-同舟云学术

Parallelization of thermochemical nanolithography

Published:2014 Issue:3 Volume:6 Page:1299-1304
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Carroll Keith M.¹²³,Lu Xi¹²³,Kim Suenne¹²³⁴⁵,Gao Yang¹²³,Kim Hoe-Joon⁶⁷⁸,Somnath Suhas⁶⁷⁸,Polloni Laura⁹¹⁰¹¹¹²¹³,Sordan Roman⁹¹⁰¹¹,King William P.⁶⁷⁸,Curtis Jennifer E.¹²³,Riedo Elisa¹²³

Affiliation:

1. School of Physics

2. Georgia Institute of Technology

3. Atlanta, USA

4. Department of Applied Physics

5. Hanyang University

6. Department of Mechanical Science and Engineering

7. University of Illinois at Urbana-Champagne

8. Urbana, USA

9. L-NESS, Department of Physics

10. Politecnico di Milano

11. 22100 Como, Italy

12. Department of Science and High Technology

13. Universitá degli Studi dell'Insubria

Abstract

This work demonstrates parallelization of thermochemical nanolithography (TCNL) with sub-50 nm resolutions over areas of 500 μm for applications in conjugated polymers and graphene.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2014/NR/C3NR05696A

Reference35 articles.

1. Hybrid strategies in nanolithography

2. New Approaches to Nanofabrication: Molding, Printing, and Other Techniques

3. Nanofabrication by scanning probe microscope lithography: A review

4. Patterning Polymeric Structures with 2 nm Resolution at 3 nm Half Pitch in Ambient Conditions

5. Can Chip Devices Keep Shrinking?

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification;Microsystems & Nanoengineering;2024-02-23

2. Tip-Based Nanofabrication;Nanofabrication;2024

3. High-sensitive two-dimensional PbI2 photodetector with ultrashort channel;Frontiers of Physics;2023-07-26

4. 先进原子力显微术在表征二维材料物性中的应用;Chinese Science Bulletin;2023-06-01

5. Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing;Advanced Materials Technologies;2023-05-23