Synthesis, structure and properties of volatile lanthanide complexes containing amidinate ligands: application for Er2O3 thin film growth by atomic layer deposition-Reference-Cited by-同舟云学术

Synthesis, structure and properties of volatile lanthanide complexes containing amidinate ligands: application for Er2O3 thin film growth by atomic layer deposition

Published:2005 Issue:39 Volume:15 Page:4224
ISSN:0959-9428
Container-title:Journal of Materials Chemistry
language:en
Short-container-title:J. Mater. Chem.

Author:

Päiväsaari Jani,Dezelah, IV Charles L.,Back Dwayne,El-Kaderi Hani M.,Heeg Mary Jane,Putkonen Matti,Niinistö Lauri,Winter Charles H.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2005/JM/B507351K

Reference63 articles.

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3. Rare-earth oxide thin films as gate oxides in MOSFET transistors

4. High-κ gate dielectrics: Current status and materials properties considerations

5. Alternative dielectrics to silicon dioxide for memory and logic devices

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