Rapid transport of nano-particles having a fractional elementary charge on average in capacitively-coupled rf discharges by amplitude-modulating discharge voltage-Reference-Cited by-同舟云学术

Rapid transport of nano-particles having a fractional elementary charge on average in capacitively-coupled rf discharges by amplitude-modulating discharge voltage

Published:2008 Issue: Volume:137 Page:127-138
ISSN:1359-6640
Container-title:Faraday Discuss.
language:en
Short-container-title:Faraday Discuss.

Author:

Shiratani Masaharu,Koga Kazunori,Iwashita Shinya,Nunomura Syota

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2008/FD/B704910B

Reference21 articles.

1. G. Decher , Polyelectrolyte Multilayers, an Overview in Multilayer Thin Films, ed. G. Decher and J. B. Schlenoff, Wiley-VCH, Weinheim, 2003, pp. 1–2

2. Grafting of VOx/TiO2 catalyst on anodized aluminum plates for structured catalytic reactors

3. Characterization of free-standing thin crystalline films on porous silicon for solar cells

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges;MRS Advances;2022-12-05

2. Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation;Japanese Journal of Applied Physics;2022-09-06

3. Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O₂/Ar capacitively coupled plasma;AIP Advances;2022-08-01

4. Plasma Synthesis of Silicon Nanoparticles: From Molecules to Clusters and Nanoparticle Growth;IEEE Open Journal of Nanotechnology;2022

5. Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma;Plasma and Fusion Research;2019-09-09