Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups
Author:
Affiliation:
1. Department of Materials Science and Engineering
2. Cornell University
3. Ithaca, USA
Abstract
The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2016/NR/C5NR07334K
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