1. [1] Levinson, H. J., J. Micro/Nanolith. MEMS MOEMS 8(4), 041501 (2009).
2. Dry Etch Resistance of Organic Materials
3. [3] Henke, B. L., Gullikson, E. M. and. Davis, J. C., Atomic Data and Nuclear Data Tables 54(2), 181-342 (1993).
4. [4] Trikeriotis, M., Bae, W. J., Schwartz, E., Krysak, M., Lafferty, N., Xie, P., Smith, B., Zimmerman, P. A., Ober, C. K. and Giannelis, E. P., Proc. SPIE 7639, 76390E/1-76390E/10 (2010).
5. [5] Krysak, M., Trikeriotis, M., Schwartz, E., Lafferty, N., Xie, P., Smith, B., Zimmerman, P. A., Montgomery, W., Giannelis, E. P. and Ober, C. K., Proc. SPIE 7972, 79721C (2011).