Metrology for 2D materials: a perspective review from the international roadmap for devices and systems-Reference-Cited by-同舟云学术

Metrology for 2D materials: a perspective review from the international roadmap for devices and systems

Published:2024 Issue:9 Volume:6 Page:2260-2269
ISSN:2516-0230
Container-title:Nanoscale Advances
language:en
Short-container-title:Nanoscale Adv.

Author:

Celano Umberto¹^ORCID,Schmidt Daniel²^ORCID,Beitia Carlos³,Orji George⁴,Davydov Albert V.⁴,Obeng Yaw⁴^ORCID

Affiliation:

1. School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ, 85287, USA

2. IBM Research, 257 Fuller Rd, Albany, NY 12203, USA

3. Unity-SC, 611 Rue Aristide Berges, 38330 Montbonnot-Saint-Martin, France

4. National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD, USA

Abstract

The International Roadmap for Devices and Systems (IRDS) predicts the integration of 2D materials into high-volume manufacturing as channel materials within the next decade, primarily in ultra-scaled and low-power devices.

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/NA/D3NA01148H

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1. Recent development of two-dimensional transition metal dichalcogenides and their applications

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