3D ordered nanostructures fabricated by nanosphere lithography using an organometallic etch mask-Reference-Cited by-同舟云学术

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3D ordered nanostructures fabricated by nanosphere lithography using an organometallic etch mask

Published:2010 Issue:8 Volume:2 Page:1455
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Ling Xing Yi,Acikgoz Canet,Phang In Yee,Hempenius Mark A.,Reinhoudt David N.,Vancso G. Julius,Huskens Jurriaan

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2010/NR/C0NR00007H

Reference32 articles.

1. New Approaches to Nanofabrication: Molding, Printing, and Other Techniques

2. SOFT LITHOGRAPHY

3. Imprint of sub‐25 nm vias and trenches in polymers

4. Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

5. A Lost-Wax Approach to Monodisperse Colloids and Their Crystals

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