Heterogeneous sensors of pressure sensor and ultraviolet photodetector fabricated by vertical 3D stacking as a multi-functional device-Reference-Cited by-同舟云学术

Heterogeneous sensors of pressure sensor and ultraviolet photodetector fabricated by vertical 3D stacking as a multi-functional device

Published:2016 Issue:100 Volume:6 Page:97976-97982
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Hsueh H. T.¹²³⁴,Lai L. T.⁵⁶⁷⁴,Juan Y. M.⁸⁹¹⁰¹¹⁴,Huang S. W.⁵⁶⁷⁴,Cheng T. C.⁵⁶⁷⁴,Lin Y. D.¹²³⁴

Affiliation:

1. National Nano Device Laboratories

2. National Applied Research Laboratories

3. Tainan 741

4. Taiwan

5. Department of Mechanical Engineering

6. National Kaohsiung University of Applied Science

7. Kaohsiung 807

8. Institute of Microelectronics

9. Department of Electrical Engineering

10. National Cheng Kung University

11. Tainan 701

Abstract

Microelectromechanical system (MEMS) piezoresistive pressure sensor and ZnO nanowires (NWs) ultraviolet (UV) photodetector were 3D integrated into a single chip with a vertically stacked structure.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA23377E

Reference22 articles.

1. Silicon Diffused-Element Piezoresistive Diaphragms

2. The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor

3. Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts

4. Ultraviolet Photodetectors Based on Anodic TiO2 Nanotube Arrays

5. Metal Oxide Nanowires for Use in Chemical Sensing Applications

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