1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. ULVAC Research Center Suzhou Co., Ltd, Suzhou 215026, China
4. ULVAC, Inc., Kanagawa 253-8543, Japan