Effect of molecular weight on the EUV-printability of main chain scission type polymers-Reference-Cited by-同舟云学术

Effect of molecular weight on the EUV-printability of main chain scission type polymers

Published:2020 Issue:17 Volume:8 Page:5958-5966
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Rathore Ashish¹²³⁴²^ORCID,Pollentier Ivan⁴²³,Singh Harpreet⁵⁶⁷⁸,Fallica Roberto⁴²³,De Simone Danilo⁴²³,De Gendt Stefan¹²³⁴²

Affiliation:

1. IMEC

2. 3001 Leuven

3. Belgium

4. KU Leuven Department of Chemistry

5. Centre for Nanoscience and Nanotechnology

6. Panjab University

7. 160014 Chandigarh

8. India

Abstract

This study on the main chain scission type polymers, PMMA and a copolymer system, shows that the EUV-printability is proportional to the M_w of the starting material, which is attributed to the enhanced litho-parameters of higher M_w material.

Funder

H2020 Marie Skłodowska-Curie Actions

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/TC/C9TC06482F

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