Phase identification of vanadium oxide thin films prepared by atomic layer deposition using X-ray absorption spectroscopy-Reference-Cited by-同舟云学术

Phase identification of vanadium oxide thin films prepared by atomic layer deposition using X-ray absorption spectroscopy

Author:

Kim Yejin¹²³⁴⁵,Song Gwang Yeom⁶⁷⁸⁹¹⁰,Nandi Raju⁶⁷⁸⁹¹⁰,Cho Jae Yu⁶⁷⁸⁹¹⁰,Heo Jaeyeong⁶⁷⁸⁹¹⁰^ORCID,Cho Deok-Yong¹²³⁴⁵^ORCID

Affiliation:

1. IPIT

2. Department of Physics

3. Jeonbuk National University

4. Jeonju 54896

5. Korea

6. Department of Materials Science and Engineering

7. Optoelectronics Convergence Research Center

8. Chonnam National University

9. Gwangju 61186

10. Republic of Korea

Abstract

X-ray absorption spectroscopy reveals the local structures of atomic-layer-deposited vanadium oxide films subject to heat treatments.

Funder

National Research Foundation of Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

Reference48 articles.

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献