Effective optimization of surface passivation on porous silicon carbide using atomic layer deposited Al2O3
Author:
Affiliation:
1. Department of Photonics Engineering
2. Technical University of Denmark
3. Lyngby
4. Denmark
5. Department of Materials Science and Engineering
6. Meijo University
7. Nagoya 468-8502
8. Japan
Abstract
Significant enhancement of photoluminescence in ALD Al2O3 passivated porous 6H-SiC.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/RA/C6RA27281A
Reference26 articles.
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4. Blue‐green luminescence from porous silicon carbide
5. Surface-state origin for the blueshifted emission in anodically etched porous silicon carbide
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