Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography-Reference-Cited by-同舟云学术

Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography

Published:2014 Issue:72 Volume:4 Page:38379-38383
ISSN:2046-2069
Container-title:RSC Adv.
language:en
Short-container-title:RSC Adv.

Author:

Li H.¹²³⁴⁵,Yu W.¹²³⁴⁵,Wang T.¹²³⁴⁵,Zhang H.¹²³⁴⁵,Niu W.¹²³⁴⁵,Abraham E.⁶⁷⁸⁹,Desmulliez M. P. Y.⁶⁷⁸⁹

Affiliation:

1. State Key Laboratory of Applied Optics

2. Changchun Institute of Optics

3. Fine Mechanics & Physics

4. Chinese Academy of Sciences

5. Changchun, P.R.China

6. MIcroSystems Engineering Centre (MISEC)

7. School of Engineering & Physical Sciences

8. Heriot-Watt University

9. Edinburgh EH14 4AS, UK

Abstract

This article reports the fabrication and characterization of polymeric micro-optical elements on curved substrates using electrostatic induced lithography.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2014/RA/C4RA05823B

Reference29 articles.

1. Fabrication of large diffractive optical elements in thick film on a concave lens surface

2. Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces

3. Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography

4. Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography

5. The fabrication of submicron patterns on curved substrates using a polydimethylsiloxane film mould

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