Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography-Reference-Cited by-同舟云学术

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Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography

Published:1999 Issue:6 Volume:17 Page:2965
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Ruchhoeft P.,Colburn M.,Choi B.,Nounu H.,Johnson S.,Bailey T.,Damle S.,Stewart M.,Ekerdt J.,Sreenivasan S. V.,Wolfe J. C.,Willson C. G.

Publisher

American Vacuum Society

Subject

General Engineering

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