Ultrasoft silicon nanomembranes: thickness-dependent effective elastic modulus-Reference-Cited by-同舟云学术

Ultrasoft silicon nanomembranes: thickness-dependent effective elastic modulus

Published:2019 Issue:32 Volume:11 Page:15184-15194
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Katiyar Ajit K.¹²³⁴,Davidson Ashwini Ann¹²³⁴^ORCID,Jang Houk¹²³⁴,Hwangbo Yun⁵⁶⁷⁸⁴,Han Byeori¹²³⁴,Lee Seonwoo¹²³⁴,Hagiwara Yohei⁹¹⁰¹¹¹²,Shimada Takahiro⁹¹⁰¹¹¹²^ORCID,Hirakata Hiroyuki⁹¹⁰¹¹¹²,Kitamura Takayuki⁹¹⁰¹¹¹²,Ahn Jong-Hyun¹²³⁴^ORCID

Affiliation:

1. School of Electrical and Electronic Engineering

2. Yonsei University

3. Seoul 03722

4. Republic of Korea

5. Department of Nano Mechanics

6. Nano Convergence and Manufacturing Systems Research Division

7. Korea Institute of Machinery & Materials (KIMM)

8. Daejeon 34103

9. Department of Mechanical Engineering and Science

10. Kyoto University

11. Kyoto 615-8540

12. Japan

Abstract

The mechanical properties of ultrathin Si nanomembranes having thicknesses of 2 to 35 nm have been investigated by determining biaxial Young's modulus. The nanomembrane sample with thickness of 2 nm showed very low modulus value of 3.25 GPa.

Funder

National Research Foundation of Korea

Japan Society for the Promotion of Science

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2019/NR/C9NR03995C

Reference45 articles.

1. Quantum Confinement Effects in Transferrable Silicon Nanomembranes and Their Applications on Unusual Substrates

2. Thickness-Dependent Phonon Renormalization and Enhanced Raman Scattering in Ultrathin Silicon Nanomembranes