Sputtered anti-reflection layer on transparent polyimide substrate improves adhesion strength to copper layer: effects of layer thickness and sputtering power-Reference-Cited by-同舟云学术

Sputtered anti-reflection layer on transparent polyimide substrate improves adhesion strength to copper layer: effects of layer thickness and sputtering power

Published:2023 Issue:20 Volume:13 Page:13880-13885
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Tsai Yuan-Nan¹²,Chin Shih-Chieh³,Chen Hsin-Yo³,Yang Ta-I.⁴^ORCID,Tsai Mei-Hui²³^ORCID,Tseng I.-Hsiang⁵^ORCID

Affiliation:

1. Department of Electronic Engineering, Lunghwa University of Science and Technology, Guishan, Taoyuan, 333326, Taiwan

2. Graduate Institute of Precision Manufacturing, National Chin-Yi University of Technology, Taichung, 411030, Taiwan

3. Department of Chemical and Materials Engineering, National Chin-Yi University of Technology, Taichung, 411030, Taiwan

4. Department of Chemical Engineering, Chung-Yuan Christian University, Chungli, Taoyuan, 320314, Taiwan

5. Department of Chemical Engineering, Feng Chia University, Taichung, 407102, Taiwan

Abstract

In order to shield the electronic circuits on a transparent polyimide (PI) substrate, an anti-reflection (AR) layer was deposited on a PI film via DC reactive magnetron sputtering.

Funder

Ministry of Science and Technology, Taiwan

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2023/RA/D3RA02148C

Reference22 articles.

1. Superhydrophobic, antireflective, flexible hard coatings with mechanically ultra-resilient moth-eye structure for foldable displays

2. Active and Deformable Organic Electronic Devices based on Conductive Shape Memory Polyimide

3. Surface modification with special morphology for the metallization of polyimide film

4. Light Scattering in Nanoparticle Doped Transparent Polyimide Substrates

5. High-barrier polyimide containing fluorenol moiety: Gas barrier properties and molecular simulations

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