Layer-by-layer thinning of two-dimensional materials

Author:

Pham Phuong V.1ORCID,Mai The-Hung1ORCID,Do Huy-Binh2ORCID,Vasundhara M.3ORCID,Nguyen Van-Huy4ORCID,Nguyen Trieu5,Bui Hao Van6ORCID,Dao Van-Duong7ORCID,Gupta Ram K.8ORCID,Ponnusamy Vinoth Kumar9101112,Park Jin-Hong13ORCID

Affiliation:

1. Department of Physics, National Sun Yat-sen University, Kaohsiung 80424, Taiwan

2. Faculty of Applied Science, Ho Chi Minh City University of Technology and Education, Thu Duc 700000, Vietnam

3. Polymers and Functional Materials Department, CSIR-Indian Institute of Chemical Technology, Tarnaka, Hyderabad 500007, India

4. Centre for Herbal Pharmacology and Environmental Sustainability, Chettinad Hospital and Research Institute, Chettinad Academy of Research and Education, Kelambakkam-603103, Tamil Nadu, India

5. Shared Research Facilities, West Virginia University, Morgantown, WV 26506, USA

6. Faculty of Materials Science and Engineering and Faculty of Electrical and Electronic Engineering, Phenikaa University, Hanoi 12116, Vietnam

7. Faculty of Biotechnology, Chemistry, and Environmental Engineering, Phenikaa University, Hanoi 100000, Vietnam

8. Department of Chemistry, Kansas Polymer Research Center, Pittsburg State University, Pittsburg, KS-66762, USA

9. Department of Medicinal and Applied Chemistry, Kaohsiung Medical University, Kaohsiung 807, Taiwan

10. Research Center for Precision Environmental Medicine, Kaohsiung Medical University, Kaohsiung 807, Taiwan

11. Department of Medical Research, Kaohsiung Medical University Hospital, Kaohsiung 807, Taiwan

12. Department of Chemistry, National Sun Yat-sen University, Kaohsiung 80424, Taiwan

13. Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon 16419, South Korea

Abstract

Etching technology – one of the representative modern semiconductor device makers – serves as a broad descriptor for the process of removing material from the surfaces of various materials, whether partially or entirely.

Funder

National Science and Technology Council

Ministry of Science and Technology, Taiwan

Ministry of Education

National Research Foundation of Korea

Ministry of Trade, Industry and Energy

Publisher

Royal Society of Chemistry (RSC)

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