Enhanced electrical properties of antimony doped tin oxide thin films deposited via aerosol assisted chemical vapour deposition-Reference-Cited by-同舟云学术

Enhanced electrical properties of antimony doped tin oxide thin films deposited via aerosol assisted chemical vapour deposition

Published:2018 Issue:27 Volume:6 Page:7257-7266
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Ponja Sapna D.¹²³⁴⁵,Williamson Benjamin A. D.¹²³⁴⁵^ORCID,Sathasivam Sanjayan¹²³⁴⁵,Scanlon David O.¹²³⁴⁵^ORCID,Parkin Ivan P.¹²³⁴⁵^ORCID,Carmalt Claire J.¹²³⁴⁵^ORCID

Affiliation:

1. Materials Chemistry Centre

2. Department of Chemistry

3. University College London

4. London WC1H 0AJ

5. UK

Abstract

A scalable CVD route to SnO₂ : Sb thin films that show resistivity as low as 4.7 × 10⁻⁴ Ω cm and a corresponding sheet resistance of 9 Ω sq⁻¹. Theoritical insight into the defect chemistry is provided by ab initio hybrid density functional theory.

Funder

Engineering and Physical Sciences Research Council

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2018/TC/C8TC01929K

Reference67 articles.

1. Bandgap narrowing in high dopant tin oxide degenerate thin film produced by atmosphere pressure chemical vapor deposition

2. Synthesis and characterization of antimony-doped tin oxide (ATO) nanoparticles with high conductivity using a facile ammonia-diffusion co-precipitation method

3. Origin of High Mobility in Molybdenum-Doped Indium Oxide

4. Properties of (200) oriented, highly conductive SnO2 thin films by chemical spray pyrolysis from non-aqueous medium: Effect of antimony doping

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