Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer-Reference-Cited by-同舟云学术

Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer

Published:2015 Issue:15 Volume:7 Page:6712-6721
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Cummins Cian¹²³⁴,Gangnaik Anushka⁵²³⁴,Kelly Roisin A.⁵²³⁴,Borah Dipu¹²³⁴⁶,O'Connell John⁵²³⁴,Petkov Nikolay⁵²³⁴,Georgiev Yordan M.⁵²³⁴,Holmes Justin D.⁵²³⁴⁶,Morris Michael A.¹²³⁴⁶

Affiliation:

1. Materials Research Group

2. Department of Chemistry and Tyndall National Institute

3. University College Cork

4. Cork, Ireland

5. Materials Chemistry and Analysis Group

6. Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN/AMBER)

Abstract

A strategy combining graphoepitaxy and a metal oxide enhanced PS-b-P4VP BCP is utilized for generating aligned Si nanofins with 10 nm feature sizes.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2015/NR/C4NR07679F

Reference48 articles.

1. Block copolymers and conventional lithography

2. Lithography and Other Patterning Techniques for Future Electronics

3. ITRS , International Technology Roadmap for Semiconductors, “Lithography”, 2013 , http://www.itrs.net/Links/2013ITRS/2013Chapters/2013Litho.pdf

4. Semiconductor Nanowire Fabrication by Bottom-Up and Top-Down Paradigms

5. With a little help from above

Cited by 52 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Engineering Three-Dimensional Morphologies in a Block Copolymer by Reversible Metal Infiltration;ACS Applied Polymer Materials;2024-09-13

2. Recent Advances in 1D Nanostructure Assembly and Direct Integration Methods for Device Applications;Small Methods;2024-08-07

3. Optimizing the Synergistic Effect of Co and Fe for Efficient and Durable Oxygen Evolution under Alkaline Conditions;ACS Applied Materials & Interfaces;2024-06-27

4. Magnetic, Electric, and Antimicrobial Properties of Chromium‐ Doped Cobalt Zinc Ferrite Nanoplates;ChemistrySelect;2024-04-09

5. Graphoepitaxially Side‐By‐Side Nanofins Along Atomic Terraces for Enhancement‐Mode FinFETs with 10⁸ On/Off Ratio;Advanced Functional Materials;2024-02-28