Evolution of short-range order in chemically and physically grown thin film bilayer structures for electronic applications

Author:

Dippel Ann-Christin123ORCID,Gutowski Olof123,Klemeyer Lars45673ORCID,Boettger Ulrich89103,Berg Fenja89103,Schneller Theodor89103,Hardtdegen Alexander1112133ORCID,Aussen Stephan1112133ORCID,Hoffmann-Eifert Susanne1112133,Zimmermann Martin v.123

Affiliation:

1. Deutsches Elektronen-Synchrotron DESY

2. 22607 Hamburg

3. Germany

4. Center for Hybrid Nanostructures (CHyN)

5. Institute of Nanostructure and Solid State Physics

6. University of Hamburg

7. 22761 Hamburg

8. Institute for Materials in Electrical Engineering (IWE2)

9. and Jülich Aachen Research Alliance for Future Information Technology (JARA-FIT)

10. 52074 Aachen

11. Peter Grünberg Institute (PGI 7 & 10) and Jülich Aachen Research Alliance for Future Information Technology (JARA-FIT)

12. Forschungszentrum Jülich GmbH

13. 52425 Jülich

Abstract

The local atomic structure of two stacked thin films is probed by applying grazing incidence x-ray total scattering at variable incidence angle and resolving pair distribution functions for each individual layer.

Funder

Helmholtz Association

Deutsche Forschungsgemeinschaft

Bundesministerium für Bildung und Forschung

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Reference47 articles.

1. K. Seshan and D.Schepis , Handbook of Thin-Film Deposition , William Andrew Publishing, Elsevier Inc. , Oxford (United Kingdom), Cambridge (Massachusetts, USA) , 4th edn, 2018

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