Inhibition of chemical interaction of molybdenum and silicon in a Mo/Si multilayer structure by the formation of intermediate compounds-Reference-Cited by-同舟云学术

Inhibition of chemical interaction of molybdenum and silicon in a Mo/Si multilayer structure by the formation of intermediate compounds

Published:2021 Issue:2 Volume:23 Page:1363-1370
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Filatova Elena O.¹²³⁴^ORCID,Sakhonenkov Sergei S.¹²³⁴^ORCID,Gaisin Aidar U.¹²³⁴^ORCID,Konashuk Aleksei S.¹²³⁴,Chumakov Ratibor G.⁵⁶⁴^ORCID,Pleshkov Roman S.⁷⁸⁹⁴,Chkhalo Nikolay I.⁷⁸⁹⁴

Affiliation:

1. Institute of Physics

2. St-Petersburg State University

3. St. Petersburg

4. Russia

5. National Research Center “Kurchatov Institute”

6. Moscow

7. Institute for Physics of Microstructure

8. Russian Academy of Sciences

9. Nizhny Novgorod 603087

Abstract

In the present study, the formation of intermediate compounds in the Mo/Si multilayer was realized by the introduction of barrier layers at the interfaces.

Funder

Russian Foundation for Basic Research

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2021/CP/D0CP05180B

Reference41 articles.

1. Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm

2. Compact scanning soft-x-ray microscope using a laser-produced plasma source and normal-incidence multilayer mirrors

3. Soft X-ray Images of the Solar Corona with a Normal-Incidence Cassegrain Multilayer Telescope