Synthesis and characterization of novel zinc precursors for ZnO thin film deposition by atomic layer deposition-Reference-Cited by-同舟云学术

Synthesis and characterization of novel zinc precursors for ZnO thin film deposition by atomic layer deposition

Published:2020 Issue:14 Volume:49 Page:4306-4314
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Han Seong Ho¹²³⁴⁵^ORCID,Agbenyeke Raphael Edem¹²³⁴⁶,Lee Ga Yeon¹²³⁴⁵,Park Bo Keun¹²³⁴⁶^ORCID,Kim Chang Gyoun¹²³⁴⁶,Lee Young Kuk¹²³⁴⁶^ORCID,Son Seung Uk⁵⁷⁸⁴^ORCID,Chung Taek-Mo¹²³⁴⁶^ORCID

Affiliation:

1. Thin Film Materials Research Center

2. Korea Research Institute of Chemical Technology

3. Daejeon 34114

4. Republic of Korea

5. Department of Chemistry and Department of Energy Science

6. Department of Advanced Materials and Chemical Engineering

7. Sungkyunkwan University

8. Gyeonggi-do 16419

Abstract

Novel zinc precursors were designed, synthesized and used for the deposition of ZnO thin films by ALD.

Funder

Korea Research Institute of Chemical Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/DT/C9DT04644E

Reference39 articles.

1. High power Co3O4/ZnO p–n type piezoelectric transducer

2. Zinc oxide waveguide produced by thermal oxidation of chemical bath deposited zinc sulphide thin films

3. Room-temperature gas sensing of ZnO-based gas sensor: A review

4. Piezoelectric Nanogenerators Based on Zinc Oxide Nanowire Arrays

5. A comparative study on a flexible ZnO-based nano-generator using Schottky and p–n junction contact for energy harvesting applications

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