Fabrication of diffraction gratings by top-down and bottom-up approaches based on scanning probe lithography
Author:
Affiliation:
1. Department of Physics
2. Pukyong National University
3. Busan 48513
4. Korea
5. Department of Nano and Electronic Physics
6. Kookmin University
7. Seoul
8. Republic of Korea
Abstract
Generation of diffraction gratings by top-down and bottom-up approaches based on scanning probe lithography is demonstrated.
Funder
National Research Foundation of Korea
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2019/NR/C8NR08499H
Reference43 articles.
1. PDMS Deposition for Optical Devices by Dip-Pen Nanolithography
2. Advanced scanning probe lithography
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5. Polymer Pen Lithography
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