Understanding KOtBu in atomic layer deposition – in situ mechanistic studies of the KNbO3 growth process-Reference-Cited by-同舟云学术

Understanding KOtBu in atomic layer deposition – in situ mechanistic studies of the KNbO3 growth process

Published:2020 Issue:38 Volume:49 Page:13233-13242
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Sønsteby Henrik H.¹²³⁴⁵^ORCID,Killi Veronica A.-L. K.¹²³⁴,Storaas Thomas A.¹²³⁴,Choudhury Devika⁵⁶⁷,Elam Jeffrey W.⁵⁶⁷⁸⁹^ORCID,Fjellvåg Helmer¹²³⁴,Nilsen Ola¹²³⁴^ORCID

Affiliation:

1. Department of Chemistry

2. University of Oslo

3. Blindern

4. Norway

5. Argonne National Laboratory

6. Argonne

7. USA

8. Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC)

9. Lemont

Abstract

Providing a deeper understanding of alkali metal-containing ternary processes in ALD by in situ FT-IR and QCM mechanistic studies.

Funder

Norges Forskningsråd

Basic Energy Sciences

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/DT/D0DT02324H

Reference22 articles.

1. Atomic layer deposition of ferroelectric LiNbO3

2. Pressure dependence of the piezoelectric polarization of LiNbO3 and LiTaO3

3. Vapor-Phase Atomic-Controllable Growth of Amorphous Li2S for High-Performance Lithium–Sulfur Batteries

4. Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3

5. Atomic Layer Deposition of Li2O–Al2O3 Thin Films

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