Morphology-controlled synthesis of NiO films: the role of the precursor and the effect of the substrate nature on the films' structural/optical properties

Author:

Battiato Sergio12345,Giangregorio Maria M.678910,Catalano Maria R.12345,Lo Nigro Raffaella11125,Losurdo Maria678910,Malandrino Graziella12345

Affiliation:

1. Dipartimento di Scienze Chimiche

2. Università degli Studi di Catania

3. INSTM UdR-Catania

4. Catania

5. Italy

6. CNR-NANOTEC

7. Istituto di Nanotecnologia

8. Dipartimento di Chimica

9. Università di Bari

10. 70126 Bari

11. Istituto per la Microelettronica e Microsistemi IMM-CNR

12. 95121 Catania

Abstract

NiO thin films were grown through MOCVD on quartz and LaAlO3 (001) single crystal substrates. The relationship between the precursor/substrate nature and film properties allowed to define the best conditions to grow good quality NiO films.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

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