Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by in situ transmission electron microscopy

Author:

Hsia Feng-Chun12345ORCID,Tang Dai-Ming1234ORCID,Jevasuwan Wipakorn1234,Fukata Naoki1234ORCID,Zhou Xin1234,Mitome Masanori1234ORCID,Bando Yoshio12346ORCID,Nordling Torbjörn E. M.5789ORCID,Golberg Dmitri123410ORCID

Affiliation:

1. International Center for Materials Nanoarchitectonics (MANA)

2. National Institute for Materials Science (NIMS)

3. Tsukuba

4. Japan

5. Department of Mechanical Engineering

6. Australian Institute for Innovative Materials

7. National Cheng Kung University

8. Tainan City 701

9. Taiwan

10. School of Chemistry

Abstract

In situ TEM observation of the 5th order normal and parametric resonances for precise evaluation of Si NWs' elastic moduli.

Funder

Japan Society for the Promotion of Science

National Institute for Materials Science

Ministry of Science and Technology, Taiwan

Australian Research Council

Queensland University of Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

General Engineering,General Materials Science,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering

Reference61 articles.

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3. Nanoelectromechanical systems

4. Nanoelectromechanical Systems

5. Nanotube Radio

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