Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR-Reference-Cited by-同舟云学术

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Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR

Published:2009 Issue:42 Volume:11 Page:9729
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Gerbaud Guillaume,Hediger Sabine,Bardet Michel,Favennec Laurent,Zenasni Aziz,Beynet Julien,Gourhant Olivier,Jousseaume Vincent

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2009/CP/B909654J

Reference40 articles.

1. Overview Of Process Integration Issues For Low K Dielectrics

2. Particle-Packing Phenomena and Their Application in Materials Processing

3. Chemical Bonding Structure of Low Dielectric Constant Si:O:C:H Films Characterized by Solid-State NMR

4. Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane

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