An old workhorse for new applications: Fe(dpm)3 as a precursor for low-temperature PECVD of iron(iii) oxide-Reference-Cited by-同舟云学术

An old workhorse for new applications: Fe(dpm)3 as a precursor for low-temperature PECVD of iron(iii) oxide

Published:2015 Issue:17 Volume:17 Page:11174-11181
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Carraro G.¹²³⁴,Maccato C.¹²³⁴,Gasparotto A.¹²³⁴,Barreca D.⁵¹⁶³⁴,Walter M.⁷⁸⁹¹⁰¹¹,Mayrhofer L.⁷⁸⁹¹⁰¹¹,Moseler M.⁷⁸⁹¹⁰¹¹,Venzo A.⁵¹⁶³⁴,Seraglia R.⁵¹⁶³⁴,Marega C.¹²³⁴

Affiliation:

1. Department of Chemistry

2. Padova University and INSTM

3. 35131 Padova

4. Italy

5. CNR-IENI and INSTM

6. Padova University

7. Fraunhofer Institute for Mechanics of Materials

8. 79108 Freiburg

9. Germany

10. Freiburg Materials Research Center

11. Freiburg University

Abstract

A combined theoretical–experimental investigation on Fe(dpm)₃ as a precursor for PECVD of iron(iii) oxide is presented. Pure Fe₂O₃ nanomaterials have been obtained at temperatures as low as 100 °C, even on flexible plastic substrates.

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2015/CP/C5CP00435G

Reference49 articles.

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5. Low-Pressure Metallorganic Chemical Vapor Deposition of Fe[sub 2]O[sub 3] Thin Films on Si(100) Using n-Butylferrocene and Oxygen

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