1. Hahn-Schickard Institute
2. 79110 Freiburg
3. Germany
4. Laboratory for MEMS Applications
5. IMTEK Department of Microsystems Engineering
6. University of Freiburg
7. Forschungszentrum Jülich GmbH
8. Helmholtz Institute Erlangen-Nürnberg for Renewable Energy (IEK-11)
9. 91058 Erlangen
10. Institute of Electric Power Systems
11. Leibniz Universität Hannover
12. 30167 Hannover
13. Department of Chemical and Biological Engineering