Influence of CH4–Ar ratios on the composition, microstructure and optical properties of Be2C films synthesized by DC reactive magnetron sputtering-Reference-Cited by-同舟云学术

Influence of CH4–Ar ratios on the composition, microstructure and optical properties of Be2C films synthesized by DC reactive magnetron sputtering

Published:2016 Issue:45 Volume:6 Page:39444-39451
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

He Yudan¹²³⁴,Luo Jiangshan¹²³⁴,Li Kai¹²³⁴,Luo Bingchi¹²³⁴⁵,Zhang Jiqiang¹²³⁴,Yin Hongbu¹²³⁴,Wu Weidong¹²³⁴⁶

Affiliation:

1. Research Center of Laser Fusion

2. China Academy of Engineering Physics

3. Mianyang

4. China

5. Science and Technology on Plasma Physics Laboratory

6. IFSA Collaborative Innovation Center

Abstract

XPS results revealed that CH content increased with the increasing of CH₄–Ar ratios, meanwhile, Be₂C was the main component in films with CH₄–Ar ratios < 5% and hydrocarbon films were obtained when ratios exceed 15%.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA02141G

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