Evolution of Structural, Morphological, Mechanical and Optical properties of TiAlN coatings by Variation of N and Al amount
Author:
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Polymers and Plastics
Link
http://link.springer.com/article/10.1007/s10904-017-0603-z/fulltext.html
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3. K. Chakrabarti, J.J. Jeong, S.K. Hwang, Y.C. Yoo, C.M. Lee, Effects of nitrogen flow rates on the growth morphology of TiAlN films prepared by an rf-reactive sputtering technique. Thin Solid Films 406, 159–163 (2002)
4. H.C. Barshilia, B. Deepthi, K.S. Rajam, Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering. Vacuum 81, 479–488 (2006)
5. Y.C. Chan, H.W. Chen, P.S. Chao, J.G. Duh, J.W. Lee, Microstructure control in TiAlN/SiNx multilayers with appropriate thickness ratios for improvement of hardness and anti-corrosion characteristics. Vacuum 87, 195–199 (2013)
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