Change with the Reactive Deposition Mode in Crystallographic and Mechanical Properties of Titanium Aluminum Nitride Coatings Obtained Via Grid-Assisted Magnetron Sputtering
Author:
Affiliation:
1. Universidade do Estado de Santa Catarina, Brasil
Publisher
FapUNIFESP (SciELO)
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
http://www.scielo.br/scielo.php?script=sci_pdf&pid=S1516-14392023000100274&tlng=en
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3. TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage;Devia DM;Appl Surf Sci,2011
4. Mechanical properties and machining performance of Ti1−xAlx N-coated cutting tools;Hörling A;Surf Coat Tech,2005
5. Characterization of (Ti,Al)N films deposited by pulsed d.c. plasma-enhanced chemical vapor deposition;Kawata K;Thin Solid Films,2001
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