Metal assisted anodic etching of silicon-Reference-Cited by-同舟云学术

Metal assisted anodic etching of silicon

Published:2015 Issue:25 Volume:7 Page:11123-11134
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Lai Chang Quan¹²³⁴,Zheng Wen⁵⁶⁷,Choi W. K.¹²³⁴⁸,Thompson Carl V.¹²³⁴⁵

Affiliation:

1. Advanced Materials for Micro- and Nano-Systems Programme

2. Singapore-MIT Alliance

3. National University of Singapore

4. Singapore 117583, Singapore

5. Department of Materials Science and Engineering

6. MIT

7. Cambridge, USA

8. Department of Electrical and Computer Engineering

Abstract

Metal assisted anodic etching (MAAE) of Si was studied to compare the effects of hole generation at Au/Si interfaces and electrolyte/Si interfaces, and investigate the effects that electronic and chemical processes have on the nanostructures formed.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2015/NR/C5NR01916H

Reference53 articles.

1. Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching

2. Preparation of Large-Area Uniform Silicon Nanowires Arrays through Metal-Assisted Chemical Etching

3. Influence of the Mobility of Pt Nanoparticles on the Anisotropic Etching Properties of Silicon

4. Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nanowire Arrays with Controlled Turning Angles

5. 3D Spirals with Controlled Chirality Fabricated Using Metal-Assisted Chemical Etching of Silicon

Cited by 43 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Environment-Friendly Non-Noble Metal-Assisted Anodic Etching of Ge Without Acids and Oxidants;2024

2. Metal-Assisted Etching of n-Type and p-Type Silicon Using Patterned Platinum Films: Spatial Distribution of Mesoporous Layer and Open Circuit Potential of Silicon;Journal of The Electrochemical Society;2023-05-01

3. The effect of Schottky barrier modulation on conduction and failure mechanisms of an Ag/WOx/p-Si based memristor;Journal of Applied Physics;2023-02-15

4. Plasmon photocatalytic CO₂ reduction reactions over Au particles on various substrates;Nanoscale;2023

5. Composite Porous Structure Formation by Platinum-Particle-Assisted Etching of a Highly-Doped p-Type Silicon: Evaluation of Charge Flow in Silicon;Journal of The Electrochemical Society;2022-10-01