Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP
Author:
Affiliation:
1. Material Science & Technology Division
2. National Institute for Interdisciplinary Science & Technology (NIIST)
3. Council of Scientific & Industrial Research (CSIR)
4. Trivandrum-695019
5. India
Abstract
Ceria nanostructures synthesized through simple synthetic protocols showed morphology dependence in the chemical mechanical planarization of glass by virtue of their diverse surface properties.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/RA/C5RA12319D
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