Building a Fab on a Chip-Reference-Cited by-同舟云学术

Building a Fab on a Chip

Published:2014 Issue:10 Volume:6 Page:5049-5062
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Imboden Matthias¹²³,Han Han⁴²³,Stark Thomas⁵²⁶,Lowell Evan⁷²³,Chang Jackson¹²³,Pardo Flavio⁸⁹¹⁰,Bolle Cristian⁸⁹¹⁰,del Corro Pablo G.¹¹¹²¹³,Bishop David J.¹²³⁴²

Affiliation:

1. Department of Electrical and Computer Engineering

2. Boston University

3. Boston, USA

4. Department of Physics

5. Division of Materials Science and Engineering

6. Brookline, USA

7. Department of Mechanical Engineering

8. Bell Labs

9. Alcatel-Lucent

10. Murray Hill, USA

11. Instituto Balseiro

12. Centro Atómico Bariloche

13. Bariloche Río, Republic of Argentina

Abstract

Source–writer–sensor components of the Fab on a Chip.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2014/NR/C3NR06087J

Reference63 articles.

1. Quantum engineering

2. The Economic Limit to Moore's Law

3. TSMC Expands Investment in Taiwan with New Milestone for Taichung GigaFab, 2013, http://www.tsmc.com/tsmcdotcom/PRListingNewsAction.do?action=detail&language=E&newsid=6361

4. Pushing the limits of lithography

5. Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art

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