A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures-Reference-Cited by-同舟云学术

A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures

Published:2023-02 Issue:1 Volume:32 Page:126-135
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Lally Richard¹^ORCID,Imboden Matthias²^ORCID,Stange Alexander³^ORCID,Barrett Lawrence K.¹^ORCID,Perez-Morelo Diego J.⁴^ORCID,Bishop David J.⁵

Affiliation:

1. Division of Materials Science, Boston University, Boston, MA, USA

2. 4K-MEMS Sàrl, Neuchâtel, Switzerland

3. Cellino Biotech, Cambridge, MA, USA

4. Centro Atómico Bariloche, Instituto de Nanociencia y Nanotecnología (INN), Comisión Nacional de Energía Atómica (CNEA), CONICET, San Carlos de Bariloche, Argentina

5. Department of Electrical and Computer Engineering, Department of Physics, Department of Mechanical Engineering, and Department of Biomedical Engineering, Division of Materials Science, Boston University, Boston, MA, USA

Funder

Defense Advanced Research Projects Agency (DARPA) Atoms to Product (A2P) Program/Air Force Research Laboratory

NSF Nanosystems Engineering Research Center for Directed Multiscale Assembly of Cellular Metamaterials with Nanoscale Precision: Celluar Metamaterials

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://ieeexplore.ieee.org/ielam/84/10035829/9972841-aam.pdf

Reference33 articles.

1. Atomic Calligraphy: The Direct Writing of Nanoscale Structures Using a Microelectromechanical System

2. Cryogenic Fab-on-a-Chip Sticks the Landing

3. Stencil Lithography for Scalable Micro- and Nanomanufacturing

4. Resistless nanofabrication by stencil lithography: A review

5. Discovery of new materials using combinatorial synthesis and high-throughput characterization of thin-film materials libraries combined with computational methods