Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnO2 thin film gas sensors

Author:

Sosada-Ludwikowska F.1,Reiner L.1,Egger L.1,Lackner E.1,Krainer J.1,Wimmer-Teubenbacher R.1,Singh V.2ORCID,Steinhauer S.3ORCID,Grammatikopoulos P.45ORCID,Koeck A.1

Affiliation:

1. Materials Center Leoben Forschung GmbH, 8700, Leoben, Austria

2. Nanoparticles by Design Unit, Okinawa Institute of Science and Technology (OIST), Graduate University, 904-0495, Okinawa, Japan

3. Department of Applied Physics, KTH Royal Institute of Technology, 106 91 Stockholm, Sweden

4. Materials Science and Engineering, Guangdong Technion – Israel Institute of Technology, Shantou, Guangdong 515063, China

5. Guangdong Provincial Key Laboratory of Materials and Technologies for Energy Conversion, Guangdong Technion – Israel Institute of Technology, Shantou, Guangdong 515063, China

Abstract

The selectivity of CMOS-integrated gas sensors based on SnO2 films deposited by spray pyrolysis and functionalised with Pt nanocatalysts by magnetron-sputtering inert-gas condensation was adjusted by simply tuning the Pt nanoparticle deposition time.

Funder

Svenska Forskningsrådet Formas

Publisher

Royal Society of Chemistry (RSC)

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