Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation-Reference-Cited by-同舟云学术

Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation

Published:2016 Issue:97 Volume:6 Page:94905-94910
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Khemasiri Narathon¹²³⁴⁵,Chananonnawathorn Chanunthorn⁶⁷⁸⁴,Klamchuen Annop⁹⁷⁸⁴,Jessadaluk Sukittaya¹²³⁴¹⁰,Pankiew Apirak⁶⁷⁸⁴,Vuttivong Sirajit⁶⁷⁸⁴,Eiamchai Pitak⁶⁷⁸⁴,Horprathum Mati⁶⁷⁸⁴,Pornthreeraphat Suppanit⁶⁷⁸⁴,Kasamechonchung Panita⁹⁷⁸⁴,Tantisantisom Kittipong⁹⁷⁸⁴,Boonkoom Thitikorn⁹⁷⁸⁴,Songsiririthigul Prayoon¹¹¹²¹³⁴,Nakajima Hideki¹⁴¹³⁴,Nukeaw Jiti¹²³⁴⁵

Affiliation:

1. College of Nanotechnology

2. King Mongkut's Institute of Technology Ladkrabang

3. Bangkok 10520

4. Thailand

5. Thailand Center of Excellence in Physics

6. National Electronics and Computer Technology Center (NECTEC)

7. NSTDA

8. Pathum Thani

9. National Nanotechnology Center (NANOTEC)

10. Nanotec-KMITL Center of Excellence Nanoelectronic Devices

11. NANOTEC-SUT Center of Excellence on Advanced Functional Nanomaterials and School of Physics

12. Suranaree University of Technology

13. Nakhon Ratchasima 30000

14. Synchrotron Light Research Institute

Abstract

Herein, we demonstrate a powerful technique, known as reactive gas-timing (RGT) rf magnetron sputtering, to fabricate high quality Zn₃N₂ thin films at room temperature without applying any additional energy sources.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA09972F

Reference41 articles.

1. Properties of n-type ZnN thin films as channel for transparent thin film transistors

2. RF-plasma assisted PLD growth of Zn3N2 thin films

3. Thin film transistors based on zinc nitride as a channel layer for optoelectronic devices

4. Structural and optical properties of Zn3N2films prepared by magnetron sputtering in NH3—Ar mixture gases

5. Atomic layer deposition of Zn3N2 thin films: growth mechanism and application in thin film transistor

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