1. State Key Laboratory of Crystal Materials, Institute of Novel Semiconductors, Shandong University, Institute of Crystal Materials, Jinan, Shandong, 250100, China
2. School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
3. Institute of Crystal Materials and Shandong Research Institute of Industrial Technology, Jinan, Shandong, 250100, China