Novel mononuclear zirconium and hafnium alkoxides; improved precursors for the MOCVD of ZrO2 and HfO2-Reference-Cited by-同舟云学术

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Novel mononuclear zirconium and hafnium alkoxides; improved precursors for the MOCVD of ZrO2 and HfO2

Published:2001-12-12 Issue:2 Volume:12 Page:165-167
ISSN:0959-9428
Container-title:Journal of Materials Chemistry
language:
Short-container-title:J. Mater. Chem.

Author:

Williams Paul A.,Roberts John L.,Jones Anthony C.,Chalker Paul R.,Bickley Jamie F.,Steiner Alexander,Davies Hywel O.,Leedham Timothy J.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2002/JM/B109994A

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