Validation of secondary fluorescence excitation in quantitative X-ray fluorescence analysis of thin alloy films

Author:

Wählisch André123ORCID,Streeck Cornelia123ORCID,Hönicke Philipp123ORCID,Beckhoff Burkhard123

Affiliation:

1. Physikalisch-Technische Bundesanstalt

2. 10587 Berlin

3. Germany

Abstract

Reference-free X-ray fluorescence analysis of multilayered, alloyed thin films in the μm regime with significant secondary fluorescence contributions.

Funder

European Association of National Metrology Institutes

European Metrology Programme for Innovation and Research

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

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