1. Delft Institute of Microsystems and Nanoelectronics
2. Delft University of Technology
3. Delft 2628 CD
4. The Netherlands
5. Institute of Microelectronics
6. Key Laboratory of Optoelectronic Technology & Systems
7. Education Ministry of China
8. Chongqing University
9. Chongqing 400044
10. China
11. Tsinghua University
12. 100084 Beijing
13. Department of Mechanical Engineering
14. Lamar University
15. Beaumont
16. USA